The vacuum furnace maintenance and maintenance

The vacuum furnace maintenance and maintenance

1, according to the PLC program of low vacuum: all the vacuum valve closed, start the mechanical pump, after waiting for its running normally (about 1 to 2 min), open to the furnace of low vacuum valve disc valve, in advance of furnace smoke low vacuum;
2, according to the PLC program, high vacuum, open the valve disc, the diffusion pump suction, after 15 Pa under vacuum, the system automatically open to preheat diffusion pump, diffusion pump in about after 45 min started its function, can closed on disc valve, at the same time open the main stop valve for vacuum degree of 1.33 x 10 Pa, the samples can only open the heating button to heat.
Vacuum furnace maintenance guide equipment operators within the scope of responsibility of equipment point check parts, with the right inspection methods and tools based on the tally equipment daily maintenance cycle; The operator according to the daily maintenance manual fill in the heat treatment equipment daily maintenance records, and check by the team leader review, maintenance man to collect the archive. According to the technical requirements after the installation of complete equipment, perfect and has a good grounding, debugging and acceptance in accordance with the following items.