On analysis of nitrogen and oxygen mixed sintering furnace

On analysis of nitrogen and oxygen mixed sintering furnace

Chain belt type sintering furnace atmosphere, Cu and O in the appropriate temperature and oxygen content of appropriate conditions the following chemical reaction: Cu + O2 - Cu2O, it has completed the preoxidation of Cu, but actually the suitable oxygen content in the process and the suitable temperature is very important, for this point, the device is equipped with two nitrogen oxygen mass flowmeter with high resolution, the two mass flowmeter in the mixed box respectively on the two interfaces of (mixed box: oxidation of nitrogen and oxygen mixed device), at the same time, each into the chamber of a stove or furnace temperature regions merged with mixed gas box connected to another interface.
Nitrogen oxygen after mixed, each node into the chamber of a stove or furnace, high-precision mass flowmeter guarantees the oxygen content in the hearth can be regulatory. Cu and O2 reaction in suitable conditions, the formation of Cu in Cu2O eutectic phase, it laid a solid foundation for high temperature sintering of DBC.
Chamber of a stove or furnace in actual temperature differ with performance temperature around 10 ℃, the real temperature of the furnace in the platform of high temperature of 1079 ~ 1081 ℃, should be about 12.5 min, under the condition of such process curve, substrate adhesion is good, the test strip adhesion test is within the scope of the requirements (copper and Al2O3 substrate adhesion greater than 60 n/cm, pulling speed of 50 mm/min).
After copper and Al2O3 substrate single adherent, there will be a curved surface radian, this is due to the different expansion coefficient of the Cu and Al2O3. When a second surface adhesion, can eliminate the bending caused by the different expansion coefficient, the surface is very smooth. Between copper and ceramic substrates without any air bubbles.